Angstrom multilayer metrology by combining spectral measurements and machine learning

With the recent explosive demand for data storage, ranging from data centers to various smart and connected devices, the need for higher-capacity and more compact memory devices is constantly increasing. As a result, semiconductor devices are now moving from 2-D to 3-D. The 3-D-NAND flash memory is the most commercially successful 3-D semiconductor device today, and its demand for supporting our data-driven world is now growing exponentially.