With the recent explosive demand for data storage, ranging from data centers to various smart and connected devices, the need for higher-capacity and more compact memory devices is constantly increasing. As a result, semiconductor devices are now moving from 2-D to 3-D. The 3-D-NAND flash memory is the most commercially successful 3-D semiconductor device today, and its demand for supporting our data-driven world is now growing exponentially.
Angstrom multilayer metrology by combining spectral measurements and machine learning
- PhysOrg
- 21. 1 2021 (21:05)